To that general query.....yes! There certainly must be more specific information you can provide. Allan...
aknoll@...
Apr 1, 2004 1:22 pm
1002
Dear Bill, You could use ellipsometry and then extract the resistivity from the Drude contribution to the ITO mathematical model. I used ellipsometry to...
Pawel Jedrzejowski
pawel.jedrzejowski@...
Apr 1, 2004 1:22 pm
1003
Dear All, We are trying to modify our PECVD system for high temperature (240C) operation. I am looking for a material to separate our RF powered showerhead...
Jason, Although it has been a long time since I've used the material, Dow Corning at one time produced a product call Malcor (I think that was the trade name)....
john_laney@...
Apr 2, 2004 10:31 am
1005
Dear Dr. Zhang, I just resolve my similar problem. I use Al2O3 and Teflon to seperate them. Best regards, celia "Zhang, Ji-Guang" <jizhang@...>...
Dear Jason, There are a quite a few ceramics that are able to seal at this temprature. Quite rightly macor a glass ceramic is fine with stands tempratures to...
Dear Jason: Viton as specified by the manufacturer DuPont has a max long term operating temperature of 204 degrees however, it can withstand 250 degrees with a...
Fabrizio Joe
jfabrizio@...
Apr 3, 2004 1:43 pm
1008
Dear Bill, We have used the eddy current method for years with good results. Our instrument is made by Delcom. http://www.delcom-inst.com/ Good Luck. Bill...
the material is called macor and is a machinable ceramic. it is still available. Al2O3 is best if you can find it in a usable form. Viton will not handle temps...
jim moore
jimtli@...
Apr 3, 2004 1:45 pm
1010
CALL FOR PAPERS ON WEAR & TRIBOLOGY with a special call for papers on Nano-Tribology 41th Annual Technical Meeting of the Society of Engineering Science ...
Suzanne L Rohde
srohde@...
Apr 5, 2004 3:45 pm
1011
Dear Christian, We produce PVD equipment for FPCBs. Our Copper evaporation boats are especially effective for the application. Regards, Vitali Verigin, ...
Vitali Verigin
coatinfo@...
Apr 6, 2004 3:26 pm
1012
Jim, Thank you very much for your input. 1. Based on DuPont 's web site (http://www.pspglobal.com/viton-properties.html), Viton can withstand 250C with a...
Celia, Thank you very much for your input. Can Teflon form a good vacuum seal at high temperature (240C)? How do you combine Al2O3 and Teflon? Could you give...
Dear Members, We are coating SiO2 and Nb2O5 layers from Si and Nb targets using ion beam sputtering and mid frequency dual magnetron sputtering methods....
Taras Lisouski
tlisouski@...
Apr 13, 2004 12:00 pm
1015
Jason, My PECVD system is now working at 400oC, and I have used Al2O3 and Teflon to seperate the electrode from the chamber. In order to realize an electrical...
Jason, We use Viton in our systems which operate at up to 250 C without any problems and change them every 6 months. They suffer from significant compression...
Leigh, Stuart
sleigh@...
Apr 13, 2004 12:04 pm
1017
Hello PVD group members, can anybody tell what the maximum of density of a SiO2 coating is - thickness 60 to 80 nm - that can be obtained by either thermal,...
Dear Members, We are coating SiO2 and Nb2O5 layers from Si and Nb targets using ion beam sputtering and mid-frequency dual magnetron sputtering methods. ...
Dear Professor Fine wishes. I am glad to introduce myself to the group as Y.L.Jeyachandran a research student from India. My broad field of research is thin...
yekkoni lakshmanan je...
yljchandran@...
Apr 13, 2004 12:07 pm
1020
By PECVD we usually obtain a density of silicon atoms of 2 E+22 Si/cm3, which is very close to pure glass density of 2.05 E+22. This has been measured for SiOx...
Fayet Pierre
pierre.fayet@...
Apr 14, 2004 3:47 pm
1021
Dear Dieter, We may prepare SiO2 film with very low proposity less than 0.1% by method High Voltage Low Temperature Sputtering (HVLTS) at substrate temperature...
Dina
thinfilm@...
Apr 14, 2004 3:48 pm
1022
Dear Dieter To get maximum density I think sputtering technique is the best as compared to other techniques. By using negative ion sputtering technique you can...
Morning! We are running a glass coating facility, with a process temperature of around 310 degrees C. I have just discovered that we are using Nylon tubing...
... ____________________________________ Donald M. Mattox Technical Director Society of Vacuum Coaters 71 Pinon Hill Place NE Albuquerque, NM 87122-1914 ...
SVC
donmattox@...
Apr 15, 2004 12:15 am
1025
PTFE tubing will work. It's good to 260 C. David Benzing Innovative Silicon Systems 1203 Foxworthy Ave San Jose, CA 95118-1212 408-265-4842...
David Benzing
dbenzing@...
Apr 15, 2004 12:15 am
1026
Why not use corrugated stainless steel bellows? These are available in any length (many feet) and can be ordered with VCR fittings on both ends. The ...
Dear Andrey, I am interested to collaborate in further studing of pure amorphous carbon thin films. Me and my coleagues prepare these films since 2001by...
Hi James, Some time has passed since this message posted. Could you send me some information on your sputtering process? E-mail would be great. Thanks. Jody...
Analytical Technologi...
sales@...
Apr 16, 2004 11:30 am
1029
Excellent idea. I've used bellows and braid reinforced bellows material available in quantity (100s of feet) from an outfit called A-1 Flexible Hose out of...
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