Hi, my doctoral work is related with zirconia nanolayers thin coatings produced by Magnetron Sputtering. I have an ZrO2 - Y2O3 target. Once I place the target...
This can happen when the targets are pressed powder and not bonded or adequately cooled. The questions I might ask when diagnosing where the problem is coming...
Hi Clara! What is happening is due to the preferencial sputtering of the oxygen. Your sputtering target gets dark color just because the zirconium quantity ...
Hello everybody, A customer of ours asked us to vapor metallize a thick Al layer on PET and a thick Cu layer on the top of the Al. Does anybody have an...
Yoash Carmi
yoash@...
Jun 7, 2004 10:28 am
1115
Hi, Everybody, I want to use rf magnetron to generate oxygen plasma to remove a thin Oleic acid layer (1.5 nm) on the substrate surface. I'm not sure which...
Clara, Unfortunately most oxide targets are very fragile to begin with and the thermal conductivity through the target width is usually very poor. Generally...
Rob M. Belan
rbelan@...
Jun 7, 2004 3:15 pm
1117
Dear Clara, As far as the cracking is concerned, its a common problem with fragile targets. The best remedy will be to indium bond onto a copper backing plate...
Dermot Monaghan
dermot.monaghan@...
Jun 8, 2004 4:57 pm
1118
Hi, I have been trying to sputter NiMnGa without success. I could not strike the plasma. Since it is a magnetic material, it may short circuit the magnetic...
Senthil, Typically the manufacturer of the sputter gun will offer high strength magnet assemblies to sputter magnetic material. If your gun is a standard...
Rob M. Belan
rbelan@...
Jun 9, 2004 2:58 pm
1120
Howdy, You might contact Gencoa ( www.gencoa.com ) in the UK. They have experience with magnetic targets. --bob...
Bob Anglemier
banglemier@...
Jun 9, 2004 2:58 pm
1121
It's likely that your magnetic field is still too weak. It lights at high pressure just because the increased neutral density decreases the mean-free-path for...
John German
jgconsulting@...
Jun 9, 2004 2:58 pm
1122
Dear Senthil, It seems to be that the target thickness for your cathode magnet array is too big. You must further decrease the target thickness. For ordinary...
If the magnetic field is adequate (minimum of 100 gauss parallel to the target surface at target thickness in my experience), a couple approaches the...
Dear All, Any lead/info. on in-line or large scale deposition systems/practices will be appreciated. Thanks, Ali Erdemir ...
Ali Erdemir
erdemir@...
Jun 10, 2004 11:28 am
1125
Hellow everybody! I´m trying to find a TiCuSil sputtering target. Does anyone know were I can get it? Thanks! Merche ... Mercedes Vila Juárez Instituto de...
Dear Senthil We may test the sputtering process of NiMnGa alloy in our High Voltage non-magnetron sputtering system. Our flat target: dia 45 - 50 mm, thickness...
Dina
thinfilm@...
Jun 11, 2004 12:00 pm
1127
Senthil, I see that, by now, you have received all the usual advice from magnetron users. An alternate approach is being developed and promoted by my company,...
Dear Merche, Cathay Advanced Materials Limited can supply it by MOSAIC TARGET method, please tell us your detailed requirements. And please visit our website...
Cathay Advanced Mater...
cachem97@...
Jun 11, 2004 12:09 pm
1129
For all your Sputtering Targets need contact us. Or visit www.scm-inc.com Best Regards, Aftab Dar ... Super Conductor Materials, Inc. 391 Spook Rock Industrial...
DAR1SCM@...
Jun 11, 2004 12:09 pm
1130
I have deposited NiMnGa films-1-2 micron thick - about four years ago and got nice ferromagnetic shape memory films. We used 3-4 mm thick targets with a dc ...
Corneliu Craciunescu
craciunescucm@...
Jun 11, 2004 12:21 pm
1131
Ali, I am not quite sure what you are requesting here but if it is information on large scale in-line equipment availability we at Planar have such a system...
john_laney@...
Jun 11, 2004 12:21 pm
1132
Ali, Check www.sstcoating.com Ali Boufelfel...
ali boufelfel
boufelfel@...
Jun 11, 2004 12:21 pm
1133
Dear Senthil, As the other contributors have mentioned, sputtering magnetic target materials is problematic. This web link explains the problem, ...
Dermot Monaghan
dermot.monaghan@...
Jun 11, 2004 12:23 pm
1134
Hi, in contrast to many contributions to this forum I'm looking for a bad adherend coating an glas like substrates. The layer should act as a kind of release...
As for a knee-jerk reaction you may want to investigate flouropolymers deposited by PECVD (there are quite a number of citations out in the literature). For a...
Fzimone@...
Jun 16, 2004 1:34 pm
1136
Hello What is the purpose of the coating? If only moderate wear resistance is require.... Is there a reason against fluorinated carbon ("Teflon") polymer film...
Hildegard Sung-Spitzl2
hildegard.sung-spitzl...
Jun 16, 2004 1:34 pm
1137
How about a thin deposit of oil or wax??...
Bob Anglemier
banglemier@...
Jun 17, 2004 12:13 am
1138
Harald, I am not sure what kind of temperature your subsequent layers are processed at but if it is low you can simply use photoresist which then can be...
john_laney@...
Jun 17, 2004 12:14 am
1139
Hi, We generated a "release layer" on a glass substrate by using carbon black (Ruß). You get a polycrystalline film of the deposited material, which can be...
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