Dear Lars, I never have been seen CemCon control hardware, I don't know. Please, only note, that MF it is middle frequency (in the range 40 to 250 kHz...
It is quite easy to get SiO2 from Si target with reactive sputtering. The trick is the silicon oxide is the precursor of SiO2 formation on the Si target. ...
Dear all, For one of our member companies we are looking for someone who can deposit 5 µm Sn on a polycarbonate foil of 0.8 mm thick. Deposition should be in...
Dear Angel, dear All The coating technique that it is most used is cathodic arc evaporation. Since the topic of production of DLc for bldes was discussed 2...
Angel: I hope all is going well in Israel. In answer to your question, I currently have a sputtering machine on the floor running TiN, TiAlN and CrN for...
Dear Kris, We can do this on a 300 mm wide foil. If this wideness is enough, don't hesitate contact me directly. Best regads Milko Angelov Executive Manager ...
What kind of tool do you have? It appears a well-known problem from old generation sputtering tools. It will be helpful if you list out your recipe, so does...
Yongbai Yin
yyin@...
Jun 3, 2005 9:01 pm
1981
Hi, The problem can be due to following reasons: 1. Deposition Rate is very low. 2. One of the reasons of milkyness is presensce of oxygen mainly or some...
Sounds like you might not have reproducible sputtering pressures. At higher pressures you get columnar growth and light scattering giving a white "mossy"...
SVC
donmattox@...
Jun 3, 2005 9:08 pm
1983
The white appearance of Al at increasing thicknesses is common and is usually a good indication of roughness. Power / pressure variations can improve this...
... "Milky appearance" means low reflectivity? There's a number of potential root causes. Most common is contamination (leaks, outgassing, stuff coming in with...
Hi, I have a stationary, heated substrate holder in a PECVD chamber. Are there any way I can rotate substrate without significant modification on the holder?...
Hello, what is the recommended method to etch substrates and deposit AlTiN films by cathodic arc deposition process and which type of cathodes best to use in a...
Vuoristo Petri
petri.vuoristo@...
Jun 3, 2005 10:59 pm
1987
Hello Vuoristo, Best way to preclean in situ substrates before AlTiN coating is ion etch with Ti ions at high ion energy. For best results you must use one...
Hi, I have been trying to sputter HfO2 on Si from a HfO2 ceramic target.The deposition conditions are 150 W Ar/O2 ratio is 10:1 at 250 C for 3 hours.But for...
Harish: 150 Watts on a 2" target is different than 150 Watts on a 6" target. Are you using RF or pulsed DC? (check dark space shield). Is the 150 Watts forward...
Hello: Browsing the internet and looking for information on PACVD I found a link to a discussion from about 3 years ago where you were expressing some interest...
javier zarate
jvzarat@...
Jun 7, 2005 9:19 am
1992
Dear Shank, The amount of O2 is 1sccm and Ar is 10 sccm.shall i lower the O2 content further? Thanks, Harish. Hussein Shanak <h_shanak@...> wrote: Dear...
Hello, are you using rf sputtering? If yes, which dc self-bias voltage do you get? How big is your target? Rf matchbox efficiency can vary between 0% and 98%,...
Since you are already feeding O2 into the chamber, why not sputter a pure metal Hf target and form the HfO2 by reaction? I think that would give you much...
... from old ... your ... problem. ... We are using an MRC 900 series. We normally sputter at 6kw around 5" to 6" per minute. Another odd thing about the...
Hi, I wonder if any one have information about the best e-beam crucibles for Ti evaporation. The technical information about our system as follows; 1- The...
Abbas Gamal
gamal@...
Jun 9, 2005 2:31 pm
1998
Call for papers: 8th Workshop on Plasma based Ion Implantation & Deposition ”°PBII&D05”±, Chengdu, China, 18-22,Sept.2005 Dear all, Plasma-based ion...
Dr. Abbas, I would try a graphite crucible liner. They are inexpensive and readily available and should work for evaporating Ti. Check out the link: ...
Hi, Water cooled copper crucibles are commonly used for Ti evaporation. Antti Korhonen Prof. Dr. Antti S. Korhonen Helsinki University of Technology P.O. Box...
Antti S Korhonen
asko@...
Jun 9, 2005 11:33 pm
2001
Dr. Abbas, The graphite crucible suggested to you will work. Eventually the Ti will stick to the crucible and it will crack, but it will still be usable for ...
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