Dear John, we do have three Astex systems. Two 1.5 KW and one 5 kW in our laboratory. Could you call me back. I am not sure if I can find drawing because our ...
BELLO Igor
apibello@...
Aug 1, 2005 1:39 pm
2107
Dear John, My phone is Office: (852) 2788 7891 Home: (852) 2994 1424 Best Wishes Igor...
BELLO Igor
apibello@...
Aug 1, 2005 1:40 pm
2108
Call William Holber at MKS in Boston Area. Sorry Don't have Phone Number. ASTEX was bought by MKS and he is the Chief Tecnologist in this area for them. Terry...
Hi colleagues, We will attend AEPSE2005 in Qing-dao city of China during Sep. 12-16. If available, I hope to meet the colleagues of our group there. See you. ...
Hi Collegaues, We found droplets and craters with sizes of several microns in Ti-based films during mid-frequency magnetron sputtering. One purpose of my...
I suggest you contact Ed Graper for advice: Graper, Edward Lebow Co 5960 Mandarin Ave Goleta, CA 93117-3372 UNITED STATES phone: 805-964-7117 ext. fax: email:...
Heidi, Platinum is very corrosive when moltent and will eat through a thin boat very quickly. We recommend a thick tungsten boat (.015" or .020") to withstand ...
rlum1@...
Aug 1, 2005 1:45 pm
2113
Try Alumina-coated boats. Heat and cool slowly to prevent cracking of the Alumina. -Greg Konesky...
g.konesky@...
Aug 1, 2005 1:46 pm
2114
Is there any information about what technique is best suited for measuring the oxygen content or degree of reduction in bulk ITO targets? Is there any...
Olsson, Maryam
maryam.olsson@...
Aug 1, 2005 1:49 pm
2115
You can deposit Pt by Pulsed Laser Deposition, starting from a Pt target. h> I am looking for some tips for themally evaporating Pt. A tungsten boat h> was...
dinescu maria
dinescum@...
Aug 1, 2005 1:50 pm
2116
Greetings everyone. I am looking for an opportunity to teach abroad during my sabbatical semester next year (January-July 2006). I'm most interested in...
James Dockendorf
james.dockendorf@...
Aug 1, 2005 1:50 pm
2117
Platinum is conveniently deposited by electron beam evaporation. Sputtering can also be used. By thermal evaporation method deposition of ~ 800 A thick...
Dear John, AsTex should be able to suppy you a manual and schematics. They are now part of MKS. Regards, D. Frank Bazzarre CEO Axic Inc. 493 Gianni St. Santa...
Frank Bazzarre
frank@...
Aug 1, 2005 1:52 pm
2119
I would like to introduce myself as a new member. My name is John Simmons and I have been around the deposition and coating Industries for the last 25 years. ...
Eliana, I see you have had many suggestions on where to locate the source of the problem. Is the problem resolved? If not may I ask what the appearance of your...
Dear Collegues, I am Thomas Debski, a new member in this group. I just wanted to introduce myself. I'm CEO by Nascatec GmbH from Germany. Nascatec GmbH is a...
Hi Terry, Thanks for taking the trouble to reply. We have tried the MKS route but perhaps did not go through William Hober. I appreciate the idea. Regards, ...
John Colligon
J.Colligon@...
Aug 4, 2005 4:16 pm
2124
Sir, I would go to the www.svc.org site and look up target suppliers in the Products and Services Directory. The ITO target manufacturers should be able to...
If your target not have enough cooling contact? Ti deposition in sputtering is a well established method, which is part of the semiconductor technology. The...
Yongbai Yin
yyin@...
Aug 4, 2005 4:18 pm
2126
... regards, Don ... -- ____________________________________ Donald M. Mattox Technical Director Society of Vacuum Coaters 71 Pinon Hill Place NE Albuquerque,...
SVC
donmattox@...
Aug 4, 2005 4:19 pm
2127
Dear Yu we observed bubbles (particularly donut shapes) and droplets on a multilayered film. Material used: glass substrate: 100nm Au: 20nm SiO2: 100 nm Al In...
Venkat Bommisetty
bvrao1@...
Aug 4, 2005 4:19 pm
2128
I am looking to buy a new replacement tube for a BOC Edwards active inverted magnetron gauge (AIM-X-NW25). Edwards does not currently have any in stock. ...
I am looking to buy a new replacement tube for a BOC Edwards active inverted magnetron gauge (AIM-X-NW25). Edwards does not currently have any in stock. ...
The bublles in the 100nm Au: 20nm SiO2: 100 nm Al layer below sounds like Al hillocks rather than droplets. Ti as a glue layer for Al to prevent the hillocks...
Yongbai Yin
yyin@...
Aug 5, 2005 10:03 pm
2131
Hello : This is Walter Sobie President of Vacutron Technologies. If you utilize an ion source as you evaporaate your materila you can control the outgasing so...
Walter Sobie
vacutron@...
Aug 5, 2005 10:03 pm
2132
Greetings! I am interested in experimenting with dielectric barrier discharges. The literature shows only general set up, leaving much of the detail to be...
Hello All, I am trying to do 'lift-off ' on nanometer thick sputter deposited Pt-SiO2-Au films on glass substrate. What is lift off: Photoresist is patterned...
Venkat Bommisetty
bvrao1@...
Aug 5, 2005 10:04 pm
2134
Howdy There were a couple of papers presented at the International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2005), San Diego, CA, USA. Last...
Bob Anglemier
banglemier@...
Aug 9, 2005 9:51 am
2135
Hallo Rao, It is possible to do clean, repeatable patterning by lift off .It is being used in a production environment on very aggressive feature sizes (sub 20...
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