What is the application and what you wanted to achieve with this Ti layer? I guess you are using this Ti layer for metal adhesion on to Si I use some 4-5 nm...
B.V.Rao
bvrao1@...
Nov 2, 2005 12:54 am
2368
Dear Zhang xiansheng, According to a Table by Randhawa, Johnson and Cunningham: Ti10Zr90N L* = 81 - 82, a* = -6.0, b* = 20 Ti25Zr75N L* = 80 - 81, a* = -4.0,...
Hello colleagues, I am new member of this group and have 3 years experience on the field of vacuum coating, nowadays working with standard vacuum coating ...
... Tantalum has two common phases the alpha and beta phase. Both superconduct -- the beta at 4.5 K and the alpha at .6K. My experience is from magnetron...
Hello Mr. B.V.Rao, I am using Ti as an Barrier layer on the Low-k materials such as SiO2, Porous Silica, BCB as of now. I want to start of with depositing...
Either the partial pressure of the precursor and or background/carrier is not uniform, pumping/precusor distribution, or the homogeneity of your radical...
mstowell@...
Nov 3, 2005 5:58 pm
2374
Dear colleagues, Our PVD vacuum chamber got an air leak, which contained about 70 % of air/nitrogen detected by residual gas analyser (RGA). The best pressure...
Greetings Jaromir, Yellow colors are usually generated by greater thickness or too high of pressure. I am guessing that your pumping port is located in the...
Gary Vergason
gvergason@...
Nov 5, 2005 11:42 pm
2376
I have two requests and hope to get help from you. 1. We have a coating chamber using a VAT gate valve which is not running smoothly while it open or close. Do...
Lin Huang
lin.huang@...
Nov 5, 2005 11:45 pm
2377
Hello Jaromir, I have seen cases where the yellow color is due to the outgassing of the uncured UV curing lacquer on the parts. This may be a consideration if...
larry.anderson@...
Nov 7, 2005 5:31 pm
2378
Lin Huang, With respect to your question #2: If you are looking to drive a MK II at 250 drive volts, my experience is that you may find that is hard to do;...
Ron Willey
rwilley@...
Nov 7, 2005 5:32 pm
2379
Hi, It's possible that you don't have an air leak from the outside. If you have a small volume of air which has become trapped in some portion of your ...
M.A. Moram
mam65@...
Nov 7, 2005 5:33 pm
2380
Morning Yin Nan, When checking for leaks pay special attention to feed-throughs - mechanical, electrical, gas and water as these can sometimes harbour leaks...
Many thanks for yours advice. but how to explain that this effect occurs e.g. only on one substrate holder and the rest is ok? during the polymerisation which...
Dear Jarous, It has been mentioned that thickness variations can cause the yellowish color, but you may also want to check into your oxygen distribution in the...
Hello Yin Nan Kok, do you use LN2 cold trap? and are you sure that the RGA peak is the nitrogen, maybe it could be CO which is desorbes from filament of your ...
Many thanks for yours advice. but how to explain that this effect occurs e.g. only on one substrate holder and the rest is ok? during the polymerisation which...
Dear All, My name is Darren Gardner and I would like to introduce myself as a new member to the group. I am a PhD student at Macquarie University, Sydney,...
The first question I would ask is what did you do? I find I'm often my own worst enemy when it comes to vacuum leak creation. What was the last maintenance/...
David Grove
david.grove@...
Nov 9, 2005 10:03 am
2387
If you have a cryo coil in the chamber from Polycold or Telemark, check the chamber with an RGA and look for Argon. If the coiul leaks, you will find an Argon...
Hans Luedi
hluedi@...
Nov 9, 2005 10:03 am
2388
This is a cool trick. Backfill your system with Argon to ATM but do not open the chamber. Pump the system back into HiVac and quickly turn on your RGA and...
Dear Yin Nan Kok You have to use a Helium Leak Detector,(MSLD). ALCATEL VACUUM Technology ,France. They are manufacturing MSLD. You may go through...
Xavier palatty
vacuumcal@...
Nov 9, 2005 10:05 am
2390
Hello All! Let me introduce myself as a new PVD Coatings and Vacuum Technology Forum member. I am Vladimir Chutko, Ph.D., with more than 30 years experience in...
Well, 6x10-5 is not a bad pressure in general... All depends on your pumping system and vacuum chamber. Is it a new chamber? I mean, have you obtained the...
Jaroush, I forgot to mention that you should also check the electrical integrity of the sample holder that creates the yellowish coatings. It might be that...
Dear all, We are going to have a conference on plasma and plasma deposition (14th Gaseous Electronics Meeting, 5-9 February 2006, Murramarang, NSW, Australia...
Yongbai Yin
yyin@...
Nov 10, 2005 11:04 am
2394
Hello all, I am looking for the company which produces 4-point probe device to measure coating thickness - aluminium an the palstic substrate. With the high...
Hello Everyone, We are depositing ZnO(intrinsic)/ZnO:Al bilayer for solar cell applications. We are presently facing problem of sheet resistance for these...
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