Dear Vasco and all, Many thanks for your wishes. Be lucky and happy during Year 2007! Best regards, Milko Angelov [Non-text portions of this message have been...
Zafar I can recommend Plasma Quest who are able to supply complete R+D systems. We have good experience with their equipment for research in our lab. Tony The...
Hai every body Wish you happy new year. This year will bring heartfull happyness. pravin koyande <shree1_11@...> wrote: Hello , I'm Pravin Koyande doing...
Dear All, There are some rear defects on SiO2 layer deposited on CaF2 substrate by Si target reactive DC magnetron sputtering (U=470V, P = 6x10-4 torr, T = 100...
hi, I am depositing TiN on Silicon (100) substrates using reactive unbalanced magnetron sputtering. For some reason, I am getting very low hardness (less than...
Dear Vladimir These defects are called spits, which are similar to what you described. Try increasing source-to substrate distance and reduce sputtering rate...
Idvac@...
Jan 7, 2007 3:59 pm
3598
All tin coatings done here are dc bias. Marion Shafer [Non-text portions of this message have been removed]...
Galco123@...
Jan 7, 2007 4:02 pm
3599
Dear Manohar From our experience with TiN for hard tools, there are many parameters which could influence the hardness. This includes: substrate bias:...
Idvac@...
Jan 7, 2007 4:02 pm
3600
1. How's your base pressure before deposition? 2.What's the indentation depth of your nanoindentation test? 3. What's the color of the coating? If your base...
Dear Vladimir, ... That is normal. ... Then use rf sputtering from the SiO2 target. From my experience this can be done without pinholes while reactive dc,...
Dear Manohar, Please mention your film thickness and your indentation depth. Also as suggested apply 1/10th rule. Caution must be excercised inusing this rule....
Professor Nadir, Thanks for your reply. I will try increasing the temperature. Do you recommend using RF substrate bias or DC substrate bias. During my...
Hi, I am using base pressure around 9*10^-7 to 1*10^-6. Colour of my coatings appears a little bit brownish. WhatI did notice was, when the coating thickness...
Hello Stan, could you send me several pictures of such device? would it be possible to send them to my e- mal j.zila AT zlin- precision.cz? thank you regards...
Happy new year! I am looking for insight in markets and performance comparison of PVD TiAlN coated carbide cutting tool inserts vs. typical CVD coated...
Malshe Ajay
apm2@...
Jan 8, 2007 12:43 pm
3607
Dear Vladimir, My experience shows that you can deposit defect-free SiO2 layers using MF pulsed reactive sputtering of doped Si target, if the pulse frequency...
Dear Manohar, The brownish colour could be related to the N/Ti ratio (for N/Ti higher than 1.02 the films became darker) and also to the surface roughness (due...
sandu
silviucosmin.sandu@...
Jan 9, 2007 3:18 pm
3609
Manohar This what you expect when using high RF on substrate since you are resputtering from substrate. Use low RF power. DC is not usefull since TiN is a ...
Idvac@...
Jan 9, 2007 3:20 pm
3610
Sent: Monday, January 08, 2007 5:12 AM Subject: MP3 Conference and TTM Symposium: International symposium on Toughening and Toughness Measurement of Ceramic...
Vasco Teixeira
vasco@...
Jan 9, 2007 3:20 pm
3611
In my experiences, higher working pressure, lower temperature and positive bias could caused the brown. Higher negative bias may resolve it. With best Regards...
Dear Manohar, It will be better to use negative to ground DC bias (-50 to -200V usually). The brownish colour of your TiN layer is due to the excess of N2 in...
We have an immediate need for a 30" or larger box coater and a D&W (Davis and Wilder) evaporation vacuum chamber. Would prefer complete operational ebeam...
Mark
ttl1@...
Jan 9, 2007 10:20 pm
3615
Dear all, I'm going to deposit thin films of zirconia via RF Magnetron Sputtering. Could someone suggest which deposition parameters should be better modulated...
Dear Prof. Ahmed, I'm sorry to disagree, but TiN is not a dielectric and is very electrically conductive. Most hard coating equipment and service providers...
Dear Erik I do apologise. TiN is a good conductor. Regards Nadir [Non-text portions of this message have been removed]...
Idvac@...
Jan 10, 2007 1:47 pm
3619
Dear Jaye, Just we have two used Box Coaters (55"). Last year we have upgraded these two metallizers with a new control system. One of this plants is equipped...
Dear Milko Angelov Kinldy let me know about the stoichiometric TiN coatings. How the properties and color changes with the Nitrogen contents Regards Zafar...
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