Dear Willey I checked our Coating Machine and found that we have Optical Monitorin System on our coater machine for 650-1900nm. is this condition and system...
Sodky: look at a CDE Resmap, by Dr. David Chang. This is an automated desktop 4-point probe system that can map film resistivity over a wafer surface. It uses...
Dear F. Noba (Rahnama), That will allow you to monitor and control NBP filters in that spectral range, since it is necessary to monitor at the wavelength of...
Ron Willey
Ron@...
Jan 3, 2008 8:28 pm
4315
Dear Dr. Mohamed, I have a company that builds custom computerized 4-point probes for thin film surface resistivity measurement. What I would need to know is...
Dear Friends, I want to enhance the Energy of my electron gun up to 100kV but I am suffering with voltage drop and current increase. I need suggestions to...
Dear Jerry, We bought a four point probe a few weeks ago. Now we are searching for a device that lowers the probe automatically to the substrate. Do you know...
Michael Böhme
MBoehme@...
Jan 9, 2008 2:48 pm
4318
Subject: ISMANAM 2008 First Circular From: ismanam@......
MRS International Materials Research Conference (IMRC 2008) June 9-12, 2008 * Chongqing * China CALL FOR PAPERS REMINDER Submission Deadline--January 15 The...
Vasco Teixeira
vasco@...
Jan 9, 2008 2:51 pm
4320
Dear Michael, If you could supply the details of teh probe you purchased (i.e. brand, any drawings or pictures, etc)I could then determine if our actuation...
Another group wants to change out the machine controller of this old evaporator, in order to add a more modern unit that can monitor and control variables not...
Dear All; The 1st International Conference on Nanomanufacturing (nanoMan2008) will be held in Singapore in conjunction with the 4th International Conf. on ...
Luo, Jack
J.Luo@...
Jan 9, 2008 5:09 pm
4323
Alan, You can try and contact Varian directly by telephone. With a little persistence, I have found them willing to fax sections of old manuals in the past. ...
Hello All; Dale Quinn of Quintronix 510-786-0439 would have manuals; he is currently recovering from open heart surgery. Another possibility is HSD ...
Chris Malocsay
malocsay@...
Jan 9, 2008 5:29 pm
4325
Warning.warning Operating an e-beam source at over 10kV will produce energetic x-rays at 20kv which will penetrate the pyrex glass windows and aluminum chamber...
Dear Munawar: I don't think raising your e-beam from 10KV to 100 KV is a good idea. First of all, I can't see the benefit. Second, unless you modify the entire...
is this a evaporation source or a RHEED / LEED type source? Is it a pierce type or bent beam type source? if you do raise the Voltage above 13kV you will have...
Jim Moore
jimtli@...
Jan 10, 2008 1:03 am
4328
Hello, I'm working on sputtering of NiTi alloy from a single target. After sputtering the stoichiometry on the wafer is significantly different from that on...
Dear Meni I think the best way for you is to use a different target composition in order to compensate for the different yeld sputtering (or maybe...
Vasco Manuel Pinto Te...
vasco@...
Jan 10, 2008 12:47 pm
4330
Meni, since Titanium has a mass of 48 amu, collisions with Ar( m=40 amu) are very efficient in transferring momentum ( that is elementary billiard ball physics...
jkools@...
Jan 10, 2008 12:49 pm
4331
If there is a constant ratio, repeatable, you may calculate the % you want to start with as an alloy, in order to obtain the required composition. The other...
Angel
angel@...
Jan 10, 2008 2:25 pm
4332
A simple suggestion - the sputter yield for Ni is 2.2x that of Ti. The target should have about twice the amount of Ti in it than it has Ni. That should be a...
Dear Meni, Do you know whether the target is an alloy or a powder blend? Powder blends suffer from a more pronounced yield differential than with an alloy....
George Wityak
gwityak@...
Jan 10, 2008 2:26 pm
4334
Dear Meni: You can try adding small metal pieces of deficient material (in your case Ti) on top of the target. This way you can also vary the composition ...
Meni, The sputtering yeilds make no difference to the film stoichiometry when using an alloy target. If one material in the alloy has a higher sputtering rate...
These answers about different sputtering yields always bother me. Think about this: at steady state, the material coming off the target must match the...
Folks, there seems to be some confusion out there as to the effect of differential sputtering yields on the relation between target composition and outgoing...
jkools@...
Jan 10, 2008 5:08 pm
4338
Dear Jim, Thank you very much for your kind attention. This is a thermioic axial (no bending)electron gun already in operation at 10kV for welding of metals by...
It is not correct assume that the stoichiometry of the metals and gasses put into a plasma will match the stoichiometry of the film produced. This difference...
POSTGRADUATE STUDENT IN STUDIES OF LOW DIMENSIONAL MAGNETIC NANOSTRUCTURES The group of Electronic and Vibrational Nanostructures of the spanish Universidad de...
Considering the operating pressure to be 10e-3 10e-4 mbar and safely neglect scattering, the sticking of the particles on the subsrates are going to be...
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