MEMS Workshop - 2004
Sponsored by ISSS and Organised by NMDC, IISc
Date: July 26th to 31st (Monday - Friday)
Venue: Golden Jubilee Seminar Hall, ECE Department, IISc Bangalore
Micro Electro Mechanical Systems (MEMS) have opened up a new possibility of
miniaturisation. The MEMS revolution is expected to play a key role in the 21st
century, similar
to the Silicon Integrated Circuits (IC) revolution in the 20th century. With
MEMS technology it
is possible to integrate sensing, control and actuation in a single chip by
combining multitude of
building blocks such as mechanical structures, electronics circuits, optical
devices, chemical and
biological sensors etc. In order to gain leadership in this field the National
Program on Smart
Materials (NPSM) has set up "National MEMS Design Centres (NMDC)" in the
country. One of
the centre is located at the Indian Institute of Science, Banaglore.
The IISc centre (http://mems.ece.iisc.ernet.in/) has been functional since April
2002.
Some of the designs that are currently undertaken include inertial sensors, RF
MEMS and optical
MEMS. The students and faculty working on these devices has gained significant
expertise by
exploring various designs and also prototyping some of them. This workshop will
give an
opportunity to the attendees to get exposed to the intricacies of MEMS design
and fabrication.
In addition to the IISc faculty and students, experts from other institutes will
also be presenting
their work in the workshop.
In addition to the lectures, we have also planned the lab sessions to provide
hands-on
exposure to the attendees on various MEMS design, process simulation and
electronics interface
design (using Coventorware, Intellisuite, MEMS-Pro, ISE-TCAD and T-Spice),
semiconductor
processing (furnace, mask aligner, evaporation/sputtering) and testing (film
thickness
measurement, electrical measurement, mechanical measurement). The detailed
program schedule
is enclosed.
The number of attendees is limited to 36. The registration fees is Rs. 6000/-
for industry
Rs. 5000/- for National Labs and Rs. 4000/- for academic institutes. You can
register by
sending the cheque / draft in favour of "MEMS Workshop- 2004". The drafts can be
sent to the
following address:
Dr. T. Badrinarayana
Department of Electrical Communication Engineering
Indian Institute of Science
Bangalore-560012
Tel: 2293-3173
Email: badri@...
PS: For outstation candidates, the accommodation is not covered in the
registration fees. They
have to manage on their own.
Date 9:30-10:30 10:30-11:30 11:30-11:45 11:45-12:45 12:45-1:45 1:45-5:00
26-Jul A1-NPSM overview A2-Micromachining Tea A3-Introduction to lab sessions
Lunch Lab: Intellisuite
27-Jul B1-Actuation Mechanisms B2-Mechanical design Tea B3-CMOS-MEMS Integration
Lunch Lab: Coventorware
28-Jul C1-Electronics interface for MEMS C2-RF MEMS Tea C3- MEMS phase shifters
Lunch Lab: Genesise-process simula
29-Jul D1-Overview of MOEMS D2-MOEMS design Tea D3 - Optical Gyro Lunch Lab:
MEMS Pro and Tanner
30-Jul E1- Smart Materials and thin films E2- Thin film sensors Tea E3-Bio MEMS
Lunch Lab: Process
31-Jul
F1- MEMS packaging
F2-MEMS for Space application
Tea
F3-MEMS development at SCL
Lunch
Lab: Testing
Resource persons for lectures
26-Jul A1-Dr. A. R. Upadhya A2-Prof. K. N. Bhat A3-Dr. Navakanta Bhat
27-Jul B1-Prof. Rudra Pratap B2-Prof. Rudra Pratap B3-Dr. P. V. Subrahmanyam
28-Jul C1-Dr. Navakanta Bhat C2-Dr. Navakanta Bhat C3-Dr. K. J. Vinoy
29-Jul D1-Prof. A. Selvarajan D2-Dr. T. Srinivas D3- Dr. Kanakaraju
30-Jul E1-Prof. S. Mohan E2-Prof. K. Rajanna E3-Prof. V. Venkataraman
31-Jul F1-Dr. K. Natarajan
F2-Dr. M. M. Nayak
F3-Dr. D. N. Singh
Labs : Groups of 3 people, Total of 12 groups. The groups will rotate on the
sessions
Lab Resource persons Tasks
2 groups Intellisuite Arun, Shishir Design examples
2 groups Coventorware Ajay, Venkatesh, Sankar Design examples
2 groups Genesise Srinivasaiah Process simulation : oxidation, ion implantation,
diffusion
2 groups Memspro/Tanner Venkatesh, Rajesh, Jyothi MEMS modeling in MEMS pro,
electronic circuits design
2 groups Process Dwarakanathan, Badri, Lithography, RF sputtering, oxidation,
evaporation
2 groups
Test Badri, Sankar, Sumesh, Saurabh
Wafer prober electrical test, Profilometer, Laser vibrometer
Number of participants is limited to 36 to enable better interaction and hands
on training
Registration fees : Rs. 6000/- for industry, Rs. 5000/- for R&D lab and Rs.
4000/- for academic institute